Eximer (EUV) Fused Silica Viewports are available with diameters up to 8 inches and include zero length designs for low profile applications. These are all bakeable to 200˚C.
- Flange Material: 304/316 Stainless Steel
- Surface Finish: 20/10
- Flatness: l /4@ 632 nm Transmitted Wavefront
- Leak Rate: <2×10(-10) atm cc/sec He
- Transmission: >99.5% @ 193nm (internal)
- Thermal Range: -100°C to 200°C