Apex Vacuum

EUV Fused Silica Weldable Viewports


EUV Grade (Excimer) Fused Silica Viewport, 1.37″ View Dia, 1.50″ Dia Stainless Steel Weld Adapter

  • Excimer Grade Fused Silica Windows
  • Bakeable to 200 degrees C
  • Non-magnetic Materials
  • Transmission for UV to 193nm
  • Compatible with UHV

More Information Below.



Eximer (EUV) Fused Silica Viewports are available with diameters up to 8 inches and include zero length designs for low profile applications. These are all bakeable to 200˚C.

  • Flange Material: 304/316 Stainless Steel
  • Surface Finish: 20/10
  • Flatness: l /4@ 632 nm Transmitted Wavefront
  • Leak Rate: <2×10(-10) atm cc/sec He
  • Transmission: >99.5% @ 193nm (internal)
  • Thermal Range: -100°C to 200°C

Additional information


1.37" EUV Grade, 2.37" EUV Grade

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