Mass Flow Controller

Mass Flow Controllers for Inert & Aggressive Gases

High Vacuum and Pressure Applications

Can Your Mass Flow Controller Control 30 Different Gases? We Can!

Apex Mass Flow Controllers for vacuum and pressure applications combine flexibility with great accuracy. Our mass flow controllers are multi-gas capable with a flexibility to choose from a list of 98 on-board gases. We offer the option to choose your input and output voltage along with the ability to use RS232 data communications. Using the optional BB9-USB Communications Box our Apex Mass Flow Controllers can control up to 27 Apex devices through one RS232 port, providing your set-up the ultimate flexibility.

What Makes us Different?

  • 30 On-Board Interchangeable Gases
  • Addressable RS-232 Digital Control Capability
  • FlowVision Computer Control/GraphingSsoftware
  • Pinpoint Accuracy of 0.2% Full Scale plus 0.8% Direct Reading
  • High Accuracy Calibration Option 0.4% FS plus 0.4% Reading
  • 200 to 1 Turndown Ration from Full Scale Flow
  • Flow Ranges from 3000 SLPM to 0.5 SCCM
  • For end users, no power supply/display boxes needed
  • RS-232 with software available
  • High Tech, Low Cost


  • Vacuum Evaporation Coating
  • Vacuum Sputtering
  • Ion-Beam Deposition
  • E-Beam Coating Systems
  • Gas Mixing
  • High Temperature Furnace Gas Control
  • Membrane Testing
  • Fuel Cell Research
  • Environmental Air Sampling
  • Research Applications

Options for Apex Mass Flow Controllers

  • TFT Display (shown above) for low light conditions
  • High Accuracy Calibration available
  • Remote Display Options
  • ATEX designs available on request
  • Secondary outputs available
  • 4-20 mAmp control available

On-Board Gas Select Screen

Additional Options - 

For Display, Special Communication ATEX and other options see the Apex Options

Apex Low Pressure Drop Mass Flow Controller

For applications that require low pressure drops across the mass flow controller. Full-scale pressure drops as low as 0.06 PSID.