Vacuum Valves

Vacuum Valve Gate Valve

Vacuum Valves

Right Angle Valves
Vacuum Gate Valves
Vacuum Ball Valves

Vacuum Valves for rough, high vacuum and ultra-high vacuum applications

Vacuum Gate Valve
High Vacuum Gate Valve
Conflat vacuum valves

High Vacuum Gate Valves

High Vacuum Gate Valves provide isolation for high vacuum pumps, such as turbo pumps, ion-pumps, or cry-pumps. Gate Valves are provided in manual and pneumatic designs, and for clean and low outgassing high vacuum applications.  Flanges can be either NW, ISO or CF.  3-position Gate Valves are available for pressure control process steps.

Ultra-High Vacuum Gate Valves

Ultra-High Vacuum (UHV) Gate Valves provide low outgassing isolation for applications needing ultra-high vacuum or vacuum bake-out. CF Flanged Gate Valves use a knife edge seal with a copper gasket bonnet seal. Both manual and pneumatic designs are available. Bake-out temperatures can be as high as 200°C with the valve open, and 150°C with the valve closed.

Right Angle Valves

Right Angle, or Poppet, Vacuum Valves provide isolation of vacuum systems. In addition, Right Angle Valves provide isolation of roughing pumps from the vacuum system. Flanges for these valves can be Tube End, NW, ISO or CF. Right Angle Valves are available in either manual or pneumatic applications. Valves can be provided with or without solenoids.

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11000 Series
Stainless Steel
Gate Valve

The KF, ISO-F, and ISO-K Flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum applications. They provide isolation valving for high vacuum pumps including Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, low outgassing valves.

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11000 Series
Stainless Steel
Gate Valve

The CF Flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum and ultra-high vacuum applications. They provide isolation valving for high vacuum pumps including Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, low outgassing valves.

Copper Bonnet Seal

Manual Operation

Gate Valve

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Copper Bonnet Seal

Pneumatic Operation

Gate Valve

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21200 Series
Stainless Steel
Viton Seal
Million Cycle
Gate Valve

The Million Cycle Gate Valves Series are vacuum valves designed for high vacuum applications when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside the vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, high cycle, low outgassing valves.

Viton Sealing O-Ring Bonnet and Gate

Pneumatic Operation

Gate Vlave

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11000 Series
Stainless Steel
Viton Seal
3-Position

The 3-Position Gate Valves are designed for use in etching, CVD, and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve has exceptional pressure control capability. The valves employ two pneumatic solenoids and an air pressure regulator to achieve three positions: fully-open, fully-closed, and an adjustable third position. The first solenoid controls the fully-open, fully-closed positions while a second solenoid controls the third position.

Viton Sealing O-Ring Bonnet and Gate

Pneumatic Operation

Gate Valve

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